AMTECH SYSTEMS INC SEC filings

CIK 720500

dateformdocument
2026-10-09SCHEDULE 13Ghttps://www.sec.gov/Archives/edgar/data/720500/0000814133-26-000112.txt
2026-09-164https://www.sec.gov/Archives/edgar/data/720500/0001193125-26-392787.txt
2026-08-254https://www.sec.gov/Archives/edgar/data/720500/0002136935-26-000004.txt
2026-08-06SCHEDULE 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0001325447-26-000032.txt
2026-08-058-Khttps://www.sec.gov/Archives/edgar/data/720500/0000720500-26-000011.txt
2026-08-058-Khttps://www.sec.gov/Archives/edgar/data/720500/0000720500-26-000009.txt
2026-08-054https://www.sec.gov/Archives/edgar/data/720500/0002136935-26-000003.txt
2026-08-054https://www.sec.gov/Archives/edgar/data/720500/0001267540-26-000001.txt
2026-08-054https://www.sec.gov/Archives/edgar/data/720500/0001223192-26-000004.txt
2026-08-0510-Qhttps://www.sec.gov/Archives/edgar/data/720500/0000720500-26-000010.txt
2026-07-27SCHEDULE 13Ghttps://www.sec.gov/Archives/edgar/data/720500/0001493152-26-034783.txt
2026-06-038-Khttps://www.sec.gov/Archives/edgar/data/720500/0000720500-26-000008.txt
2026-06-03424B5https://www.sec.gov/Archives/edgar/data/720500/0000720500-26-000007.txt
2026-06-02SCHEDULE 13D/Ahttps://www.sec.gov/Archives/edgar/data/720500/0001104659-26-069614.txt
2026-06-01S-3MEFhttps://www.sec.gov/Archives/edgar/data/720500/0000720500-26-000006.txt
2026-06-01424B5https://www.sec.gov/Archives/edgar/data/720500/0000720500-26-000005.txt
2026-06-014https://www.sec.gov/Archives/edgar/data/720500/0001104659-26-068888.txt
2026-05-294https://www.sec.gov/Archives/edgar/data/720500/0002136935-26-000002.txt
2026-05-294https://www.sec.gov/Archives/edgar/data/720500/0001223192-26-000003.txt
2026-05-293https://www.sec.gov/Archives/edgar/data/720500/0002136935-26-000001.txt
2026-05-293https://www.sec.gov/Archives/edgar/data/720500/0001223192-26-000002.txt
2026-05-26SDhttps://www.sec.gov/Archives/edgar/data/720500/0000720500-26-000004.txt
2026-05-143https://www.sec.gov/Archives/edgar/data/720500/0001420485-26-000004.txt
2026-05-078-Khttps://www.sec.gov/Archives/edgar/data/720500/0001193125-26-211962.txt
2026-05-078-Khttps://www.sec.gov/Archives/edgar/data/720500/0001193125-26-211838.txt
2026-05-0710-Qhttps://www.sec.gov/Archives/edgar/data/720500/0001193125-26-211854.txt
2026-04-308-Khttps://www.sec.gov/Archives/edgar/data/720500/0001193125-26-195969.txt
2026-03-23EFFECThttps://www.sec.gov/Archives/edgar/data/720500/9999999995-26-000911.txt
2026-03-18CORRESPhttps://www.sec.gov/Archives/edgar/data/720500/0000720500-26-000003.txt
2026-03-16UPLOADhttps://www.sec.gov/Archives/edgar/data/720500/0000000000-26-002672.txt
2026-03-13S-3https://www.sec.gov/Archives/edgar/data/720500/0000720500-26-000002.txt
2026-03-068-Khttps://www.sec.gov/Archives/edgar/data/720500/0000720500-26-000001.txt
2026-03-064https://www.sec.gov/Archives/edgar/data/720500/0001256949-26-000003.txt
2026-03-064https://www.sec.gov/Archives/edgar/data/720500/0001193125-26-096720.txt
2026-03-064https://www.sec.gov/Archives/edgar/data/720500/0001193125-26-096467.txt
2026-03-064https://www.sec.gov/Archives/edgar/data/720500/0001104659-26-024720.txt
2026-02-13SCHEDULE 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0001398344-26-003122.txt
2026-02-058-Khttps://www.sec.gov/Archives/edgar/data/720500/0001193125-26-039351.txt
2026-02-0510-Qhttps://www.sec.gov/Archives/edgar/data/720500/0001193125-26-039360.txt
2026-01-23DEF 14Ahttps://www.sec.gov/Archives/edgar/data/720500/0001193125-26-020762.txt
2026-01-23ARShttps://www.sec.gov/Archives/edgar/data/720500/0001193125-26-020766.txt
2026-01-21SCHEDULE 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0000354204-26-000303.txt
2025-12-158-Khttps://www.sec.gov/Archives/edgar/data/720500/0001193125-25-319228.txt
2025-12-108-Khttps://www.sec.gov/Archives/edgar/data/720500/0001193125-25-314185.txt
2025-12-1010-Khttps://www.sec.gov/Archives/edgar/data/720500/0001193125-25-314147.txt
2025-12-018-Khttps://www.sec.gov/Archives/edgar/data/720500/0001193125-25-304022.txt
2025-12-018-Khttps://www.sec.gov/Archives/edgar/data/720500/0001193125-25-303881.txt
2025-09-034https://www.sec.gov/Archives/edgar/data/720500/0001104659-25-086997.txt
2025-08-154https://www.sec.gov/Archives/edgar/data/720500/0000950170-25-109373.txt
2025-08-068-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-25-103999.txt
2025-08-0610-Qhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-25-104002.txt
2025-05-30SDhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-25-079283.txt
2025-05-164https://www.sec.gov/Archives/edgar/data/720500/0001104659-25-050117.txt
2025-05-164https://www.sec.gov/Archives/edgar/data/720500/0000950170-25-073717.txt
2025-05-128-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-25-069140.txt
2025-05-1210-Qhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-25-069135.txt
2025-04-098-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-25-052548.txt
2025-04-04SCHEDULE 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0000906304-25-000074.txt
2025-03-214https://www.sec.gov/Archives/edgar/data/720500/0000950170-25-043411.txt
2025-03-19S-8https://www.sec.gov/Archives/edgar/data/720500/0000950170-25-041938.txt
2025-03-124https://www.sec.gov/Archives/edgar/data/720500/0001104659-25-022964.txt
2025-03-078-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-25-034957.txt
2025-03-074https://www.sec.gov/Archives/edgar/data/720500/0001104659-25-021752.txt
2025-03-074https://www.sec.gov/Archives/edgar/data/720500/0000950170-25-035616.txt
2025-03-074https://www.sec.gov/Archives/edgar/data/720500/0000950170-25-035589.txt
2025-03-074https://www.sec.gov/Archives/edgar/data/720500/0000950170-25-035575.txt
2025-03-054https://www.sec.gov/Archives/edgar/data/720500/0001104659-25-020979.txt
2025-02-24DEFA14Ahttps://www.sec.gov/Archives/edgar/data/720500/0000950170-25-025653.txt
2025-02-18SCHEDULE 13D/Ahttps://www.sec.gov/Archives/edgar/data/720500/0001104659-25-014731.txt
2025-02-184https://www.sec.gov/Archives/edgar/data/720500/0001104659-25-014728.txt
2025-02-12SCHEDULE 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0001591546-25-000007.txt
2025-02-11SCHEDULE 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0001398344-25-002365.txt
2025-02-104https://www.sec.gov/Archives/edgar/data/720500/0001104659-25-010932.txt
2025-02-058-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-25-014472.txt
2025-02-0510-Qhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-25-014465.txt
2025-02-033https://www.sec.gov/Archives/edgar/data/720500/0000950170-25-012331.txt
2025-01-28SCHEDULE 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0000906304-25-000018.txt
2025-01-24DEF 14Ahttps://www.sec.gov/Archives/edgar/data/720500/0000950170-25-008792.txt
2025-01-24ARShttps://www.sec.gov/Archives/edgar/data/720500/0000950170-25-008847.txt
2025-01-238-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-25-008328.txt
2024-12-134https://www.sec.gov/Archives/edgar/data/720500/0001104659-24-128442.txt
2024-12-1210-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-135825.txt
2024-12-098-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-134499.txt
2024-11-12SC 13Ghttps://www.sec.gov/Archives/edgar/data/720500/0001325447-24-000034.txt
2024-10-31SC 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0000354204-24-004700.txt
2024-10-15SC 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0000906304-24-000084.txt
2024-09-178-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-107300.txt
2024-09-06SC 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0001398344-24-017646.txt
2024-08-164https://www.sec.gov/Archives/edgar/data/720500/0000950170-24-098167.txt
2024-08-134https://www.sec.gov/Archives/edgar/data/720500/0001104659-24-089070.txt
2024-08-094https://www.sec.gov/Archives/edgar/data/720500/0000950170-24-094908.txt
2024-08-093https://www.sec.gov/Archives/edgar/data/720500/0000950170-24-094905.txt
2024-08-078-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-092969.txt
2024-08-0710-Qhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-092822.txt
2024-05-29SDhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-066021.txt
2024-05-14SC 13D/Ahttps://www.sec.gov/Archives/edgar/data/720500/0001104659-24-061136.txt
2024-05-144https://www.sec.gov/Archives/edgar/data/720500/0001104659-24-061139.txt
2024-05-088-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-055712.txt
2024-05-0810-Qhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-055725.txt
2024-03-184https://www.sec.gov/Archives/edgar/data/720500/0000950170-24-033003.txt
2024-03-134https://www.sec.gov/Archives/edgar/data/720500/0000950170-24-030819.txt
2024-03-088-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-028631.txt
2024-03-084https://www.sec.gov/Archives/edgar/data/720500/0001104659-24-032377.txt
2024-03-084https://www.sec.gov/Archives/edgar/data/720500/0000950170-24-028649.txt
2024-03-084https://www.sec.gov/Archives/edgar/data/720500/0000950170-24-028633.txt
2024-03-058-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-025892.txt
2024-03-044https://www.sec.gov/Archives/edgar/data/720500/0001104659-24-030469.txt
2024-03-044https://www.sec.gov/Archives/edgar/data/720500/0000950170-24-024996.txt
2024-03-044https://www.sec.gov/Archives/edgar/data/720500/0000950170-24-024901.txt
2024-03-044https://www.sec.gov/Archives/edgar/data/720500/0000950170-24-024899.txt
2024-02-298-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-023120.txt
2024-02-15UPLOADhttps://www.sec.gov/Archives/edgar/data/720500/0000000000-24-001832.txt
2024-02-154https://www.sec.gov/Archives/edgar/data/720500/0000950170-24-015974.txt
2024-02-144https://www.sec.gov/Archives/edgar/data/720500/0001104659-24-023568.txt
2024-02-12SC 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0001591546-24-000002.txt
2024-02-09SC 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0000354204-24-003104.txt
2024-02-09SC 13Ghttps://www.sec.gov/Archives/edgar/data/720500/0001398344-24-002399.txt
2024-02-09CORRESPhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-013146.txt
2024-02-098-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-013261.txt
2024-02-0910-Qhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-013277.txt
2024-02-01UPLOADhttps://www.sec.gov/Archives/edgar/data/720500/0000000000-24-001253.txt
2024-01-24ARShttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-007034.txt
2024-01-23SC 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0000906304-24-000001.txt
2024-01-19DEF 14Ahttps://www.sec.gov/Archives/edgar/data/720500/0000950170-24-005875.txt
2023-12-204https://www.sec.gov/Archives/edgar/data/720500/0001104659-23-127725.txt
2023-12-194https://www.sec.gov/Archives/edgar/data/720500/0001209191-23-059189.txt
2023-12-148-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-070474.txt
2023-12-1410-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-070422.txt
2023-12-138-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-070049.txt
2023-12-118-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-069441.txt
2023-08-254https://www.sec.gov/Archives/edgar/data/720500/0001209191-23-047396.txt
2023-08-214https://www.sec.gov/Archives/edgar/data/720500/0001104659-23-093900.txt
2023-08-178-K/Ahttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-043246.txt
2023-08-164https://www.sec.gov/Archives/edgar/data/720500/0001209191-23-046145.txt
2023-08-164https://www.sec.gov/Archives/edgar/data/720500/0001209191-23-046105.txt
2023-08-154https://www.sec.gov/Archives/edgar/data/720500/0001209191-23-045828.txt
2023-08-144https://www.sec.gov/Archives/edgar/data/720500/0001104659-23-091290.txt
2023-08-098-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-040579.txt
2023-08-0910-Qhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-040599.txt
2023-07-074https://www.sec.gov/Archives/edgar/data/720500/0001209191-23-041854.txt
2023-05-31SDhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-025359.txt
2023-05-254https://www.sec.gov/Archives/edgar/data/720500/0001104659-23-064616.txt
2023-05-234https://www.sec.gov/Archives/edgar/data/720500/0001209191-23-031669.txt
2023-05-184https://www.sec.gov/Archives/edgar/data/720500/0001104659-23-062245.txt
2023-05-164https://www.sec.gov/Archives/edgar/data/720500/0001209191-23-029811.txt
2023-05-154https://www.sec.gov/Archives/edgar/data/720500/0001104659-23-060715.txt
2023-05-108-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-020516.txt
2023-05-1010-Qhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-020556.txt
2023-04-038-K/Ahttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-011642.txt
2023-03-144https://www.sec.gov/Archives/edgar/data/720500/0001104659-23-032260.txt
2023-03-038-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-005998.txt
2023-03-034https://www.sec.gov/Archives/edgar/data/720500/0001209191-23-015505.txt
2023-03-034https://www.sec.gov/Archives/edgar/data/720500/0001209191-23-015454.txt
2023-03-034https://www.sec.gov/Archives/edgar/data/720500/0001209191-23-015412.txt
2023-03-034https://www.sec.gov/Archives/edgar/data/720500/0001104659-23-028404.txt
2023-02-13SC 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0001591546-23-000004.txt
2023-02-134https://www.sec.gov/Archives/edgar/data/720500/0001104659-23-019691.txt
2023-02-10SC 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0000354204-23-001493.txt
2023-02-088-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-002154.txt
2023-02-0810-Qhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-002163.txt
2023-02-07SC 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0000906304-23-000075.txt
2023-01-23SC 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0000906304-23-000001.txt
2023-01-20DEF 14Ahttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-000975.txt
2023-01-188-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-000865.txt
2023-01-184https://www.sec.gov/Archives/edgar/data/720500/0001209191-23-003723.txt
2023-01-183https://www.sec.gov/Archives/edgar/data/720500/0001209191-23-003721.txt
2023-01-178-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-23-000819.txt
2022-12-054https://www.sec.gov/Archives/edgar/data/720500/0001209191-22-059824.txt
2022-12-054https://www.sec.gov/Archives/edgar/data/720500/0001209191-22-059820.txt
2022-11-308-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-22-025867.txt
2022-11-304https://www.sec.gov/Archives/edgar/data/720500/0001209191-22-059064.txt
2022-11-304https://www.sec.gov/Archives/edgar/data/720500/0001209191-22-059063.txt
2022-11-3010-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-22-025872.txt
2022-10-144https://www.sec.gov/Archives/edgar/data/720500/0001209191-22-053677.txt
2022-09-134https://www.sec.gov/Archives/edgar/data/720500/0001104659-22-099619.txt
2022-09-064https://www.sec.gov/Archives/edgar/data/720500/0001104659-22-097850.txt
2022-08-268-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-22-017822.txt
2022-08-254https://www.sec.gov/Archives/edgar/data/720500/0001209191-22-047495.txt
2022-08-254https://www.sec.gov/Archives/edgar/data/720500/0001209191-22-047493.txt
2022-08-158-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-22-017389.txt
2022-08-1510-Qhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-22-017419.txt
2022-05-26SDhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-22-010767.txt
2022-05-174https://www.sec.gov/Archives/edgar/data/720500/0001104659-22-061940.txt
2022-05-118-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-22-009331.txt
2022-05-1110-Qhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-22-009352.txt
2022-04-288-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-22-006561.txt
2022-03-25S-8https://www.sec.gov/Archives/edgar/data/720500/0001564590-22-011838.txt
2022-03-048-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-22-002915.txt
2022-03-044https://www.sec.gov/Archives/edgar/data/720500/0001209191-22-016273.txt
2022-03-044https://www.sec.gov/Archives/edgar/data/720500/0001209191-22-016266.txt
2022-03-044https://www.sec.gov/Archives/edgar/data/720500/0001209191-22-016262.txt
2022-03-044https://www.sec.gov/Archives/edgar/data/720500/0001104659-22-030585.txt
2022-02-24SC 13D/Ahttps://www.sec.gov/Archives/edgar/data/720500/0001104659-22-026737.txt
2022-02-244https://www.sec.gov/Archives/edgar/data/720500/0001104659-22-026690.txt
2022-02-14SC 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0001591546-22-000002.txt
2022-02-148-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-22-001214.txt
2022-02-1410-Qhttps://www.sec.gov/Archives/edgar/data/720500/0000950170-22-001222.txt
2022-02-09SC 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0001104659-22-016479.txt
2022-02-08SC 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0000354204-22-001658.txt
2022-01-18DEF 14Ahttps://www.sec.gov/Archives/edgar/data/720500/0000950170-22-000375.txt
2022-01-14SC 13G/Ahttps://www.sec.gov/Archives/edgar/data/720500/0000906304-22-000001.txt
2021-11-244https://www.sec.gov/Archives/edgar/data/720500/0001104659-21-143575.txt
2021-11-198-Khttps://www.sec.gov/Archives/edgar/data/720500/0000950170-21-004811.txt
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